1912-28-3 Usage
Description
Ethanesulfonic acid, methyl ester, also known as Methyl Ethanesulfonate, is a sulfonic acid ester with the chemical formula CH3-S-CH2-O-SO3H. It is transparent in the region around 157 nm and is characterized by its unique chemical properties and reactivity.
Uses
Used in Vacuum-UV Photoresist Applications:
Ethanesulfonic acid, methyl ester is used as a precursor in the design and development of vinyl alkylsulfonate polymers for vacuum-UV photoresist applications. Its transparency around 157 nm makes it a suitable candidate for this purpose, as it can contribute to the creation of high-quality photoresist materials with desired properties.
Used in Density Functional Theory (DFT) Calculations:
In the field of computational chemistry, Ethanesulfonic acid, methyl ester is utilized in Density Functional Theory (DFT) calculations. These calculations are essential for understanding the electronic structure and properties of materials, which can be further applied to optimize the design of vacuum-UV photoresist polymers and other related applications.
Safety Profile
Experimental
reproductive effects. Mutation data
reported. When heated to decomposition it
emits toxic fumes of SOx.
Check Digit Verification of cas no
The CAS Registry Mumber 1912-28-3 includes 7 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 4 digits, 1,9,1 and 2 respectively; the second part has 2 digits, 2 and 8 respectively.
Calculate Digit Verification of CAS Registry Number 1912-28:
(6*1)+(5*9)+(4*1)+(3*2)+(2*2)+(1*8)=73
73 % 10 = 3
So 1912-28-3 is a valid CAS Registry Number.
InChI:InChI=1/C3H8O3S/c1-3-7(4,5)6-2/h3H2,1-2H3
1912-28-3Relevant articles and documents
Process for preparation of oxyglutaric acid ester derivatives
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, (2008/06/13)
A process for preparing an oxyglutaric acid ester derivative of the formula: STR1 in which each of R1 and R2 is C1-5 alkoxy, C1-7 aralkyloxy, C7-9 halogenated aralkyloxy or phenyl, R4 is a hydroxyl-protecting group, and R5 is C1-10 alkyl which may have a substituent, comprises the steps of reacting a methyl phosphonate derivative or methyl phosphine oxide derivative with an oxyglutaric acid mono-ester to give a reaction product which comprises an oxyglutaric acid derivative having a phosphorus-containing group and a pentenedioic acid mono-ester (by-product), removing the pendenedioic acid mono-ester from the reaction product to isolate the oxyglutaric acid derivative, and converting the isolated oxyglutaric acid derivative into the oxyglutaric acid ester derivative. A process for obtaining an optically active oxyglutaric acid ester derivative is also disclosed.
Studies on chemical carcinogens and mutagens. XXV. Chemoselectivity of alkyl sulfonates toward 4-(p-nitrobenzyl)pyridine (NBP) in phosphate buffer
Ninomiya,Kohda,Kawazoe
, p. 1326 - 1332 (2007/10/02)
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