1383805-12-6

Basic information

• Product Name: diphenyl(diphenoxyethane)sulfonium triflate
• Synonyms: diphenyl(diphenoxyethane)sulfonium triflate
• CAS NO: 1383805-12-6
• Molecular Weight: 548.604
• Mol File: 1383805-12-6.mol
• Article Data: 1

Chemical Properties

• CAS DataBase Reference: diphenyl(diphenoxyethane)sulfonium triflate(CAS DataBase Reference)
• NIST Chemistry Reference: diphenyl(diphenoxyethane)sulfonium triflate(1383805-12-6)
• EPA Substance Registry System: diphenyl(diphenoxyethane)sulfonium triflate(1383805-12-6)

Safety Data

• Hazardous Substances Data: 1383805-12-6(Hazardous Substances Data)

Upstream product

• 358-23-6 trifluoromethylsulfonic anhydride 
• 945-51-7 1,1'-sulfinylbisbenzene 
• 104-66-5 1,2-diphenoxyethane 

Relevant articles and documents

SULFONIUM COMPOUND, PHOTO-ACID GENERATOR, AND METHOD FOR MANUFACTURING THE SAME

A sulfonium compound represented by formula (1), a photo-acid generator, and a method for producing a sulfonium compound are provided: wherein X represents an electron-donating group; R1 and R2 each represent an alkyl group, a cycloalkyl group, or the like; R3 and R4 each represent an arylene group or a heteroarylene group; R5 and R6 each represent an alkyl group, a cycloalkyl group, or the like; and A? and B? are anions that are different from each other. The sulfonium compound, when used as a photo-acid generator, can produce a uniform and excellent resist pattern.