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Trichlorosilane

  • Name Trichlorosilane
  • EINECS233-042-5
  • CAS No. 10025-78-2
  • Density1.34 g/cm3
  • PSA0.00000
  • LogP1.42000
  • SolubilityWater: decomposes
  • Melting Point-127 °C
  • FormulaCl3HSi
  • Boiling Point31.8 °C at 760 mmHg
  • Molecular Weight135.452
  • Flash Point-27 °C
  • Transport InformationUN 1295 4.3/PG 1
  • AppearanceClear liquid
  • Safety16-26-36/37/39-43-45-7/9-43A
  • Risk Codes12-14-17-20/22-29-35
  • Molecular Structure
    Molecular Structure of 10025-78-2 (Trichlorosilane)
  • Hazard SymbolsHighlyF+,CorrosiveC
  • SynonymsHighlyF+,CorrosiveC
  • Article Data104

Trichlorosilane Synthetic route

7440-21-3

silicon

A

75-79-6

Methyltrichlorosilane

B

10026-04-7, 53609-55-5

tetrachlorosilane

C

10025-78-2

trichlorosilane

D

75-78-5

dimethylsilicon dichloride

Conditions
ConditionsYield
With methylene chloride; copper In neat (no solvent) mixt. of CH3Cl/N2 (2:5) and Si-Cu (9:1) at 300°C;;A 4%
B n/a
C n/a
D 86.5%
With methylene chloride; copper In neat (no solvent) mixt. of CH3Cl/N2 (2:5) and Si-Cu (9:1) at 300°C;;A 4%
B n/a
C n/a
D 86.5%
With methylene chloride; copper In neat (no solvent) CH3Cl and Si-Cu mixt. (8:2) at 350°C;;
141-57-1

n-propyltrichlorosilane

10025-78-2

trichlorosilane

Conditions
ConditionsYield
With hydrogen; Rh, Re/C at 550℃; under 5807.73 Torr; for 10.1h; Product distribution / selectivity;82%
7647-01-0

hydrogenchloride

Cu(b),Si(20) (X%)

Cu(b),Si(20) (X%)

A

10026-04-7, 53609-55-5

tetrachlorosilane

B

10025-78-2

trichlorosilane

Conditions
ConditionsYield
In neat (no solvent) reaction at 300 °C;;A 20%
B 80%
In neat (no solvent) reaction at 300 °C;;A 20%
B 80%
115-21-9

ethyltrichlorosilane

10025-78-2

trichlorosilane

Conditions
ConditionsYield
With hydrogen; Rh, Re/C at 700℃; under 5947.36 Torr; for 17.8833h; Product distribution / selectivity;75.3%
75-79-6

Methyltrichlorosilane

A

10026-04-7, 53609-55-5

tetrachlorosilane

B

10025-78-2

trichlorosilane

Conditions
ConditionsYield
With hydrogen; Rh/C at 800℃; Product distribution / selectivity;A 73.3%
B 25.1%
10026-04-7, 53609-55-5

tetrachlorosilane

1333-74-0

hydrogen

10025-78-2

trichlorosilane

Conditions
ConditionsYield
In neat (no solvent) SiCl4 reacted with H2 in thermo-plasma at 50 kW at 3500-5000 K;72.9%
In neat (no solvent) Kinetics; byproducts: hydrogen chloride; bubbling H2 through liq. SiCl4 at constant temp.; introducing into the discharge zone; various product ratios yield various H2:SiCl4 molar ratio, molar energy input, and pressure; gas chromy.;60%
at 900 - 1300℃; under 1125.11 - 3750.38 Torr; Product distribution / selectivity;
75-79-6

Methyltrichlorosilane

10025-78-2

trichlorosilane

Conditions
ConditionsYield
With hydrogen; Rh, Re/C at 550℃; under 4556.19 Torr; for 4.55h; Product distribution / selectivity;70.8%
7647-01-0

hydrogenchloride

7440-21-3

silicon

10025-78-2

trichlorosilane

Conditions
ConditionsYield
With CuO-ZnO-In2O3 mesocrystal microspheres Reagent/catalyst;61.2%
In not given heating of silicon washed with HCl and dried in a stream of HCl at 450-500 °C;;
In not given heating of silicon washed with HCl and dried in a stream of HCl at 450-500 °C;;
at 230 - 260℃;
75-79-6

Methyltrichlorosilane

A

75-54-7

Dichloromethylsilane

B

10026-04-7, 53609-55-5

tetrachlorosilane

C

10025-78-2

trichlorosilane

Conditions
ConditionsYield
With hydrogen; Rh/C at 700℃; Product distribution / selectivity;A 5.5%
B 28.2%
C 22.9%
10026-04-7, 53609-55-5

tetrachlorosilane

1333-74-0

hydrogen

7440-21-3

silicon

10025-78-2

trichlorosilane

Conditions
ConditionsYield
copper(l) chloride at 525℃; Product distribution / selectivity;6.14%
at 525℃; Product distribution / selectivity;4.6%
at 500℃; under 22502.3 Torr; Product distribution / selectivity; Industry scale;

Trichlorosilane Consensus Reports

Reported in EPA TSCA Inventory.

Trichlorosilane Standards and Recommendations

DOT Classification:  4.3; Label: Dangerous When Wet, Flammable Liquid, Corrosive

Trichlorosilane Specification

1. Introduction of Trichlorosilane

The Trichlorosilane belongs to product categories of Reduction; Si (Classes of Silicon Compounds); Si-Cl Compounds; Si-H Compounds; Silicon Compounds (for Synthesis); Synthetic Organic Chemistry; Trichlorosilanes; Chloro Silanes; POSS Precursors and Intermediates; Protecting and Derivatizing Reagents; RSiCl3Protection and Derivatization; Silicon-Based; Silsesquioxanes: POSS Nanohybrids. This chemical is a clear liquid and should be stored in a ventilated, cool and dry place. Besides, it is the basic ingredient used in the production of purified polysilicons.

2. Properties of Trichlorosilane

Physical properties about Trichlorosilane are: (1)ACD/LogP: 4.77; (2)ACD/LogD (pH 5.5): 4.77; (3)ACD/LogD (pH 7.4): 4.77; (4)ACD/BCF (pH 5.5): 2501.35; (5)ACD/BCF (pH 7.4): 2501.35; (6)Enthalpy of Vaporization: 26.57 kJ/mol; (7)Boiling Point: 31.8 °C at 760 mmHg; (8)Vapour Pressure: 596 mmHg at 25 °C.

3. Structure Descriptors of Trichlorosilane

You could convert the following datas into the molecular structure:
1). Canonical SMILES: [Si](Cl)(Cl)Cl
2). InChI: InChI=1S/Cl3Si/c1-4(2)3
3). InChIKey: PPDADIYYMSXQJK-UHFFFAOYSA-N

4. Toxicity of Trichlorosilane

Organism Test Type Route Reported Dose (Normalized Dose) Effect Source
mammal (species unspecified) LC50 inhalation 1gm/m3 (1000mg/m3) LUNGS, THORAX, OR RESPIRATION: ACUTE PULMONARY EDEMA

LIVER: FATTY LIVER DEGERATION

BLOOD: OTHER CHANGES
Toksikologiya Novykh Promyshlennykh Khimicheskikh Veshchestv. Toxicology of New Industrial Chemical Substances. For English translation, see TNICS*. Vol. 3, Pg. 81, 1961.
mouse LC50 inhalation 1500mg/m3/2H (1500mg/m3)   "Toxicometric Parameters of Industrial Toxic Chemicals Under Single Exposure," Izmerov, N.F., et al., Moscow, Centre of International Projects, GKNT, 1982Vol. -, Pg. 114, 1982.
rat LCLo inhalation 500ppm/4H (500ppm)   Union Carbide Data Sheet. Vol. 2/21/1979,
rat LD50 oral 1030mg/kg (1030mg/kg)   Journal of Industrial Hygiene and Toxicology. Vol. 31, Pg. 60, 1949.

5. Safety Information of Trichlorosilane

When you are using this chemical, please be cautious about it. As a chemical, it is spontaneously flammable in air and causes severe burns. It is also harmful by inhalation and if swallowed. Besides, it reacts violently with water and liberates toxic gas. During using it, wear suitable protective clothing, gloves and eye/face protection. Keep container tightly closed and in a well-ventilated place away from sources of ignition. In case of contact with eyes, rinse immediately with plenty of water and seek medical advice. If accident happens or you feel unwell seek medical advice immediately.

6. Preparation of Trichlorosilane

Preparation of Trichlorosilane: it is prepared by blowing hydrogen chloride through a bed of silicon powder at 300°C. The yield is about 80-90%. What's more, the reaction produces byproducts of silicon tetrachloride (chemical formula SiCl4), hexachlorodisilane (Si2Cl6), and dichlorosilane (H2SiCl2), which can be separated by distillation.

Si+3HCl→HSiCl3+H2

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