32992-96-4 Usage
Description
BIS(ETHYLCYCLOPENTADIENYL)RUTHENIUM(II), also known as Bis(ethylcyclopentadienyl)ruthenium(II) (Ru(EtCp)2), is a metal-organic compound that possesses unique properties and characteristics. It is composed of a ruthenium atom bonded to two ethylcyclopentadienyl ligands, which contribute to its chemical and physical properties. BIS(ETHYLCYCLOPENTADIENYL)RUTHENIUM(II) has gained significant attention in various fields due to its potential applications and benefits.
Uses
Used in Atomic Layer Deposition (ALD) Industry:
BIS(ETHYLCYCLOPENTADIENYL)RUTHENIUM(II) is used as a precursor for atomic layer deposition (ALD) processes to create thin films of ruthenium (Ru) and well-aligned ruthenium dioxide (RuO2) nanorods. BIS(ETHYLCYCLOPENTADIENYL)RUTHENIUM(II)'s unique structure and properties make it an ideal candidate for ALD, a technique that allows for the precise control of film thickness and uniformity at the atomic level.
Application Reason:
The use of BIS(ETHYLCYCLOPENTADIENYL)RUTHENIUM(II) in ALD is driven by the need for high-quality, uniform, and conformal thin films and nanostructures in various applications, such as electronics, energy storage, and catalysis. The ALD process enables the formation of these structures with excellent control over their composition, morphology, and properties, making it a valuable technique for advancing the performance of various devices and systems.
Check Digit Verification of cas no
The CAS Registry Mumber 32992-96-4 includes 8 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 5 digits, 3,2,9,9 and 2 respectively; the second part has 2 digits, 9 and 6 respectively.
Calculate Digit Verification of CAS Registry Number 32992-96:
(7*3)+(6*2)+(5*9)+(4*9)+(3*2)+(2*9)+(1*6)=144
144 % 10 = 4
So 32992-96-4 is a valid CAS Registry Number.
InChI:InChI=1/2C7H9.Ru/c2*1-2-7-5-3-4-6-7;/h2*3-6H,2H2,1H3;
32992-96-4Relevant articles and documents
Organic compound for CVD raw material and method of manufacturing metallic or metallic compound thin film using the organic compound
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Page/Page column 6-7, (2010/10/19)
The present invention provides an organic compound for CVD raw material prepared by mixing a first organometallic compound and at least one second organometallic compound, said first organometallic compound having a central metal atom and at least one ligand coordinated thereto and said second organic compound having the same central metal as that of the first organometallic compound and at least one different ligand coordinated thereto from the ligand of the first organometallic compound, wherein the first and second organometallic compounds differ in decomposition behavior. In particular, a CVD raw material having both easy handling and good adhesiveness to thin film, which have not been so far sufficiently compatible with each other, can be obtained by mixing a cyclopentadienyl complex or a derivative thereof as the first organometallic compound, and a β-diketonato compound as the second organometallic compound.
