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18166-43-3

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18166-43-3 Usage

Description

TRI-T-BUTOXYSILANOL, also known as tris(tert-butoxy)silanol, is a chemical compound that serves as a silicon oxide source and a precursor for various deposition systems. It is known for its ability to react with metal alkyl amides and other compounds, making it a versatile component in the formation of metal silicates and silica layers.

Uses

Used in Nanotechnology Industry:
TRI-T-BUTOXYSILANOL is used as a silicon oxide source for rapid atomic layer deposition (ALD) to prepare various nanolaminates. This application is crucial for creating thin, uniform layers of materials with precise control over thickness and composition, which is essential in the development of advanced nanostructures and devices.
Used in Deposition Systems:
TRI-T-BUTOXYSILANOL is used as precursors packaged for deposition systems. Its role as a precursor allows for the controlled deposition of specific materials in a variety of applications, including the formation of thin films and coatings.
Used in Semiconductor Industry:
TRI-T-BUTOXYSILANOL is used as a reactant with tetrakis(dimethylamino)-hafnium vapor (Hf(N(CH3)2)4) for vapor phase deposition of hafnium silicate glass films. This process is vital in the production of semiconductor devices, as hafnium silicate glass films are used as insulating layers and gate dielectrics in transistors.
Used in ALD Process:
TRI-T-BUTOXYSILANOL is used for atomic layer deposition (ALD) of highly conformal layers of amorphous silicon dioxide and aluminum oxide nanolaminates. The ALD process allows for the creation of ultra-thin, uniform, and conformal layers of materials, which is essential for various applications in microelectronics, optoelectronics, and other industries.

Check Digit Verification of cas no

The CAS Registry Mumber 18166-43-3 includes 8 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 5 digits, 1,8,1,6 and 6 respectively; the second part has 2 digits, 4 and 3 respectively.
Calculate Digit Verification of CAS Registry Number 18166-43:
(7*1)+(6*8)+(5*1)+(4*6)+(3*6)+(2*4)+(1*3)=113
113 % 10 = 3
So 18166-43-3 is a valid CAS Registry Number.
InChI:InChI=1/C12H28O4Si/c1-10(2,3)14-17(13,15-11(4,5)6)16-12(7,8)9/h13H,1-9H3

18166-43-3 Well-known Company Product Price

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  • Aldrich

  • (697281)  Tris(tert-butoxy)silanol  packaged for use in deposition systems

  • 18166-43-3

  • 697281-25G

  • 17,971.20CNY

  • Detail
  • Aldrich

  • (553468)  Tris(tert-butoxy)silanol  99.999%

  • 18166-43-3

  • 553468-5G

  • 1,083.42CNY

  • Detail
  • Aldrich

  • (553468)  Tris(tert-butoxy)silanol  99.999%

  • 18166-43-3

  • 553468-25G

  • 3,751.02CNY

  • Detail

18166-43-3SDS

SAFETY DATA SHEETS

According to Globally Harmonized System of Classification and Labelling of Chemicals (GHS) - Sixth revised edition

Version: 1.0

Creation Date: Aug 14, 2017

Revision Date: Aug 14, 2017

1.Identification

1.1 GHS Product identifier

Product name hydroxy-tris[(2-methylpropan-2-yl)oxy]silane

1.2 Other means of identification

Product number -
Other names tri-tert-butylsilanol

1.3 Recommended use of the chemical and restrictions on use

Identified uses For industry use only.
Uses advised against no data available

1.4 Supplier's details

1.5 Emergency phone number

Emergency phone number -
Service hours Monday to Friday, 9am-5pm (Standard time zone: UTC/GMT +8 hours).

More Details:18166-43-3 SDS

18166-43-3Relevant articles and documents

Facile Synthesis of Unsymmetrical Trialkoxysilanols: (RO)2(R′O)SiOH

Docherty, Scott R.,Estes, Deven P.,Copéret, Christophe

, (2018/03/05)

Trialkoxysilanols, (RO)3SiOH, are useful as ligands in transition-metal complexes because they provide models for silica-supported metal sites or precursors for the thermolytic precursor approach. However, their synthesis is mostly limited to symmetrical ones, where all RO ligands are the same. However, unsymmetrically substituted trialkoxysilanols could offer significant advantages over their symmetrical counterparts by facilitating crystallization of complexes, lowering crystallographic disorder, changing the thermal properties of the complexes made, and making the addition of pendant functional groups possible. Herein, a simple, general synthetic procedure yielding unsymmetrical trialkoxysilanols (RO)2(R′O)SiOH is presented using imidazole as a promoter.

Tris(tert-butoxy)siloxy derivatives of boron, including the boronous acid HOB[OSi(OtBu)3]2 and the metal (siloxy)boryloxide complex Cp2Zr(Me)OB[OSi(OtBu)3]2: A remarkable crystal structure with 18 independent molecules in its asymmetric unit

Fujdala, Kyle L.,Oliver, Allen G.,Hollander, Frederick J.,Tilley, T. Don

, p. 1140 - 1150 (2008/10/08)

Silanolysis of B(OtBu)3 with 2 and 3 equiv of HOSi(OtBu)3 led to the formation of BuOB[OSi(OtBu)3]2 (1) and B[OSi(OtBu)3]3 (2), respectively. Compounds 1 and 2 are efficient single-source molecular precursors to B/Si/O materials via thermolytic routes in nonpolar media, as demonstrated by the generation of BO1.5·2SiO2 (BOSi2xg and BO1.5·3SiO2 (BOSi3xg) xerogels, respectively. Use of a block copolymer template provided B/Si/O materials (BOSi2epe and BOSi3epe) with a broad distribution of mesopores (by N2 porosimetry) and smaller, more uniform particle sizes (by TEM) as compared to the nontemplated materials. Hydrolyses of 1 and 2 with excess H2O resulted in formation of the expected amounts of tBuOH and HOSi(OtBu)3; however, reaction of 1 with 1 equiv of H2O led to isolation of the new boronous acid HOB[OSi(OtBu)3]2 (3). This ligand precursor is well suited for the synthesis of new metal (siloxy)boryloxide complexes via proton-transfer reactions involving the BOH group. The reaction of 3 with Cp2ZrMe2 resulted in formation of Cp2Zr(Me)OB[OSi(OtBu)3]2 (4) in high yield. This rare example of a transition metal boryloxide complex crystallizes in the triclinic space group P1 and exhibits a crystal structure with an unprecedented number of independent molecules in its asymmetric unit (i.e., Z = 18 and Z = 36). This unusual crystal structure presented an opportunity to perform statistical analyses of the metric parameters for the 18 crystallographically independent molecules. Complex 4 readily converts to Cp2Zr[OSi(OtBu)3]2 (5) upon thermolysis or upon dissolution in Et2O at room temperature.

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