17475-68-2

Basic information

• Product Name: HAFNIUM TRIFLUOROACETYLACETONATE
• Synonyms: HAFNIUM TRIFLUOROPENTANEDIONATE;HAFNIUM TRIFLUOROACETYLACETONATE;HAFNIUM(III) TRIFLUOROACETYLACETONATE;Hafnium 1,1,1-trifluoro-2,4-pentanedionate;Hafnium(IV) trifluoroacetylacetone, 98%;Hafnium(IV) trifluoroacetylacetonate;Hafnium(Ⅳ)Trifluoroacetylacetonate;Nsc177689
• CAS NO: 17475-68-2
• Molecular Formula: C20H16F12HfO8
• Molecular Weight: 790.81
• Mol File: 17475-68-2.mol
• Article Data: 0

Chemical Properties

• Melting Point: 128-129°C
• Boiling Point: 115°C/0.05mmHg
• Flash Point: 26.1 °C
• Appearance: /
• Density: 1.334g/cm³
• Vapor Pressure: 0.108mmHg at 25°C
• Refractive Index: 1.386
• Solubility: Soluble in acetone, cyclohexane
• CAS DataBase Reference: HAFNIUM TRIFLUOROACETYLACETONATE(CAS DataBase Reference)
• NIST Chemistry Reference: HAFNIUM TRIFLUOROACETYLACETONATE(17475-68-2)
• EPA Substance Registry System: HAFNIUM TRIFLUOROACETYLACETONATE(17475-68-2)

Safety Data

• Statements: 20/21/22
• Safety Statements: 22-36/37/39
• TSCA: No
• Hazardous Substances Data: 17475-68-2(Hazardous Substances Data)

Usage

General Description

Hafnium trifluoroacetylacetonate is a chemical compound with the formula Hf(C5H7O2F3)4. It is a hafnium complex formed with trifluoroacetylacetone, a beta-diketone ligand. Hafnium trifluoroacetylacetonate is commonly used as a precursor for the deposition of hafnium-containing thin films through techniques such as chemical vapor deposition and atomic layer deposition. These thin films have applications in electronic and optical devices, as well as in the fabrication of high-k dielectric materials for advanced semiconductor devices. Hafnium trifluoroacetylacetonate is also used as a catalyst in organic synthesis reactions. It is a yellow solid with a strong odor and is handled with care due to its potential toxicity.

InChI:InChI=1/C5H5F3O2/c1-3(9)2-4(10)5(6,7)8/h2,10H,1H3/b4-2-